Automatic Matching Network

Description

• CE Marked
  
• Conservatively Rated
  
• Programmable Presets
  
• DC Probe Standard
  
• Optional Pulse Detector
  
• High Voltage Vacuum Variable Capacitors
  
• Generator Forward Power
  
• Reflected Power and DC Bias Voltage Displayed
  
• Analog or RS-232/422 Serial Interface
  
• Low Losses / Wide Tuning Range
  
• Single Point System Integration
  

Product Description

• Seren "AT Series" automatic matching networks automatically transform plasma impedances to 50Ohms, regardless of load variations with the advanced, intelligent, MC-2 matching network controller.

MC-2 Controller

• The MC-2 Controller os designed meet the required accuracy and repeatability of the most demanding processes. MC-2 controller standard features include: independent selection of auto/manual operation of either or both Load and Tune Capacitors, Record strike preset, Programmable Internal and External Presets, Back-out feature, Probe select, Probe Atteunation Factor and Programmable Limits. The MC-2 front panel controls and indicators are logically grouped, with operational status displayed in a four line Vacuum Fluorescent Display. Available display information: Generator Forward Power, Generator Reflected Power, DC or RF Probe Voltage, Capacitor Positions, Preset Positions and Phase/Magnitude Error signals.
  The MC-2 controller's Loop-through Interface provides a single point interface for the generator and matching network.

Matching Network

• Seren AT Series matching networks components conservatively rated for continuous duty. "L" or inverted "L" configurations are available, to accommodate a wide range of impedances and applications. Both configurations feature low losses and wide tuning ranges.

Phase and Magnitude sensors

• Phase and Magnitude sensor are located within the chassis of the AT Series matching network. The Phase sensor is associated with the operation of the Tune capacitor, the Magnitude sensor is associated with the operation of the Load capacitor. Together, they sense the voltage and current on an Internal RF transmission line and generate a direct current (DC) steering signal to deive the servo amplifiers in the MC-2 Matching Network Controller.

Voltage Probe

• A DC Voltage probe is included within the AT-Series Matching Networks. The probe provides a means to measure the developed DC Voltage within the chamber. The DC Voltage probe's output signal is proportional to the developed DC within the chamber.

Pulse Detector

• A pulse detector option is available for a period of (15) months from date of shipment.

Warranty

• Seren products are warranted against defect for a period of (15)months from date of shipment.

Service

• Seren IPS products are supported by a World Wide Network of qualified service engineers. Consult our web page for locations in your area.