RF Generator

Features

• CE Marked
• Internal DC Switcher
• RS-232/422/485
• Dual Power Range
• Programmable Pulsing
• Agile Frequency Tuning
  

Product Description

• The Seren R3001 is a second-generation, 300 Watt, 100-460KHz RF generator. This compact, air-cooled unit is designed to exceed the most stringent vacuum processing demands. The L301 can be used as the sole source for plasma generation, as a Bias generator, or as one of several generators in a multiple generator configuration. The front panel controls and indicators are logically grouped, with operational status shown on the front panel four line fluorescent display.
• Seren "R Series" products incorporate a single surface mount technology printed circuit board for controls and RF amplifier. The RF amplifier is powered by a rugged tapped transformer, rectifier and filter capacitor.
• Seren "R Series" products utilize Field-Effect Transistors in the exciter and power amplifier stages. The unit operates in a class AB mode providing power accuracy and stability across the entire power range.

Rating

• The R3001's power amplifier is rated at 50% of its actual design capability.

Protection

• Seren generators are protected against excessive Voltage Standing Wave Ratio(VSWR) conditions by limiting reflected power, power amplifier current, and power amplifier transistor dissipation.

Agency compliance

• The Seren R3001 carries CE Marking(EMC and Safety) and meets FCC regulation for spurious radiated emissions.

Control Interfaces

• The R3001 is a microprocessor controlled, solid-state RF generator. This product can be controlled by: (1) a selectable serial RS-232/422/485 interface, (2) a 25 pin D-sub analog interface connector, or (3) the front panel.

Power controls

• The Seren R3001 can regulate its power output utilizing the following control modes: DC Voltage, RF Voltage, Forward Power Leveling, and Load Power Leveling. The L301 can operate as master or a slave generator in dual generator and/or Bias applications.

Warranty

• Seren products are warranted against defect for a period of (15)months from date of shipment.

Service

• Seren IPS products are supported by a World-Wide Network of qualified service engineers. Consult our web page for locations in your area.